Exhibit info「IIT 2026」

Sumitomo Heavy Industries Material Solutions Co., Ltd. is pleased to announce that our presence in IIT 2026 to be at Congress Centre Villach, Austria.

 

Date：September 17 to September 24, 2026

Location： Congress Centre Villach

Booth：#21 (1^st floor)

URL： https://www.iitvillach2026.com/  

 

 

We will also present the following papers at the conference.

 

Oral presentations

• Laser Irradiation Effect during Implant on Si and SiC Substrate
  by TaeHoon Huh
• Laser-assisted implantation method followed by an activation process by µs UV-laser annealing for the formation of highly doped p-type junctions in SiC
  by Shintaro Hirano

 

Poster presentations

• Deep and Flat Profile Formation by Tilt-Angle Modulation at Fixed Energy in High-Energy Ion Implantation
  by Shintaro Hirano
• Beam Position Measurement for a High-Energy Ion Implantation System
  by Mikio Yamaguchi
• Control of Film Thickness Distribution Within a Wafer by Mapping-Based Intentional Non-Uniform Dose Ion Implantation
  by Takuya Sakaguchi
• Enhanced Hydrogen Ion Beam Current for GSDIII-180
  by Hiroki Murooka
• Evaluation of Al Implantation Uniformity in 8-inch SiC Wafers by 4-Point-Probe Measurement
  by Shintaro Hirano
• High-Energy Multi-Step Channeling Implantation for Superjunction Structures in SiC
  by Akichika Ono
• UV Laser Annealing of Polycrystalline Silicon on Insulator
  by Anthony Albanese